LED Process Substrate Process LED Equipment Substrate Equipment Consumables

Products / LED thinning process equipment list
Automatic CMP Polishing Machine

【Description 】

ASingle Side CMP Machine with unique Plate Angle Adjustment Design, plus spindle speed 

  control possible for ensure better production quality


Work spindle with independent servo motor design

Air Cylinder Pressing Control with multiple pressure stage setting

  Plate Cooling system for improving production quality
  PLC Programmed controlled (CIM Support Possible)
  Adjustable working shaft position, to increase the PAD lifetime



Sapphire SiC GaAs Silicon AlN ZnO GaP
 v  v



2"   2.5"  3"  4"    5"   6" 
v     v   v     v    v  



【Keyword】 自動CMP拋光機 / 自动CMP抛光机 / Automatic CMP Polishing Machine